Optical MEMS

Optical MEMS Mirror Array

Micralyne has end-to-end experience fabricating Optical MEMS for the telecommunications market. In partnership with leading module and components suppliers, Micralyne enables optical MEMS development and manufacturing of next generation:

• Reconfigurable optical add/drop modules [ROADM]
• Light valves
• Wavelength blockers
• MEMS Mirrors & Switches
• External cavity resonators
• Variable optical attenuators [VOA]
• Silicon optical benches

Fabricating MEMS Optical Devices

Manufactured at Micralyne, these and other MEMS optical devices are fundamental building blocks within an optical telecommunications infrastructure.

Helping to bring customers’ products to market is Micralyne’s first priority. Micralyne provides invaluable process and design guidance during the critical initial stages of product development. Micralyne also has extensive experience in taking a customer’s initial design and optimizing it to meet Micralyne’s manufacturing processes for volume manufacturing.

Micralyne’s current optical MEMS technology toolbox includes:

• Planar electrostatic actuation
• Low stress multilayer mirrors
• Glass/Si bonding
• Silicon on insulator [SOI]
• Dicing protection technology
• Vertical comb drive
• Double SOI
• Patterned insulator SOI
• Ion milling

Beyond these optical MEMS capabilities, Micralyne is very flexible in adapting to customers’ specific design requirements. Test and measurement procedures are also developed to ensure that customers’ products are of high quality.

If you are interested in learning more, please contact us to determine how Micralyne can address your optical MEMS needs.