MEMS Microfabricated Components
Micralyne offers several standard MEMS products or MEMS product families that have efficient access to microfabricated components and technology; these MEMS products are listed below.
| Gold-Tin (AuSn) Solder Electroplating Micralyne offers a patented process for electroplating of AuSn solder alloy, at compositions from 10 to 40 Sn (wt%), in patterned or unpatterned shapes onto metallized substrates at virtually any thickness. |
MEMS AuSn Solder |
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| GLAD GLAD or GLancing Angle Deposition is a patented technology that enables the MEMS microfabrication of highly structured thin films with engineerable features, such as film thickness, porosity, and geometry. The choice of materials are broad including a large variety of inorganic (metals, oxides, glass) and organic materials. |
GLAD Thin Film Zig-Zags |
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| Micragem™ Micragem™ is a SOI-based MEMS fabrication process with a set of design and process guidelines that can be used by companies to manufacture a number of different types of MEMS components in a standardized fashion. At the basic level, Micragem™ is a four-mask lithography MEMS process. Depending on the level of customization required, more layers could be added to increase versatility. |
MEMS Micragem™ Process |
MEMS Microfluidic Products
| Standard Microfluidic Chips These MEMS chips feature simple designs for single sample injection, and are ideally suited to a wide variety of chemical and biochemical analyses by means of capillary electrophoresis with laser-induced fluorescence. Standard Microfluidic Chips are economically priced and available off-the-shelf for efficient delivery. |
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| Protolyne® Microfluidic Chips Protolyne is a development platform for semi-custom MEMS microfluidic chips that will be fabricated, based on a customer’s design, quickly and for a reasonable price. Devices are run in batches containing devices with different designs. Customers are required to follow some simple design guidelines. |
MEMS Protolyne® Microfluidic Chip |
MEMS Optical Products
| Spatial Light Valve (SLV) The Spatial Light Valve (SLV) offers a high speed and high throughput linear array of MEMS optical switch elements, useful for high resolution displays or high pixel count graphic arts applications. The SLV structure affords exceptional switching speeds, in the tens of MHz, enabling data throughput in the tens of Gbit/second rates. |
MEMS Optical Spatial Light Valve |
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| Silicon Optical Bench (SiOB) Micralyne custom designs and manufactures application-specific Silicon Optical Bench (SiOB) Systems that serve as a platform for highly integrated MEMS optical components. |
MEMS Silicon Optical Bench |