Micralyne – MEMS Foundry
Capabilities

MEMS Microfabricated Components

Micralyne offers several standard MEMS products or MEMS product families that have efficient access to microfabricated components and technology; these MEMS products are listed below.

Gold-Tin (AuSn) Solder Electroplating
Micralyne offers a patented process for electroplating of AuSn solder alloy, at compositions from 10 to 40 Sn (wt%), in patterned or unpatterned shapes onto metallized substrates at virtually any thickness.
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AuSn Solder MEMS AuSn Solder
GLAD
GLAD or GLancing Angle Deposition is a patented technology that enables the MEMS microfabrication of highly structured thin films with engineerable features, such as film thickness, porosity, and geometry. The choice of materials are broad including a large variety of inorganic (metals, oxides, glass) and organic materials.
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GLAD Thin Films GLAD Thin Film Zig-Zags
Micragem™
Micragem™ is a SOI-based MEMS fabrication process with a set of design and process guidelines that can be used by companies to manufacture a number of different types of MEMS components in a standardized fashion. At the basic level, Micragem™ is a four-mask lithography MEMS process. Depending on the level of customization required, more layers could be added to increase versatility.
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Micragem MEMS Process MEMS Micragem™ Process

MEMS Microfluidic Products

Standard Microfluidic Chips
These MEMS chips feature simple designs for single sample injection, and are ideally suited to a wide variety of chemical and biochemical analyses by means of capillary electrophoresis with laser-induced fluorescence. Standard Microfluidic Chips are economically priced and available off-the-shelf for efficient delivery.
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Microfluidic Chips MEMS Microfluidic Chip
Protolyne® Microfluidic Chips
Protolyne is a development platform for semi-custom MEMS microfluidic chips that will be fabricated, based on a customer’s design, quickly and for a reasonable price. Devices are run in batches containing devices with different designs. Customers are required to follow some simple design guidelines.
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Protolyne Microfluidic Chips MEMS Protolyne® Microfluidic Chip

MEMS Optical Products

Spatial Light Valve (SLV)
The Spatial Light Valve (SLV) offers a high speed and high throughput linear array of MEMS optical switch elements, useful for high resolution displays or high pixel count graphic arts applications. The SLV structure affords exceptional switching speeds, in the tens of MHz, enabling data throughput in the tens of Gbit/second rates.
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MEMS Optical Spatial Light Valve MEMS Optical Spatial Light Valve
Silicon Optical Bench (SiOB)
Micralyne custom designs and manufactures application-specific Silicon Optical Bench (SiOB) Systems that serve as a platform for highly integrated MEMS optical components.
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Silicon Optical Bench MEMS Silicon Optical Bench