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MEMS Sensor Devices
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MEMS (Micro-Electro-Mechanical-Systems)
are components that have feature sizes in the scale of
microns. To put that in perspective, the size of a human
hair is commonly between 60-100 microns thick and often
MEMS features are only a few microns in size. MEMS
devices commonly have both a sensing and actuation
element.
Micralyne’s core capabilities involve the integration
of a variety of micromachining
technologies to create high value mems sensor
devices.
Examples of Common MEMS Sensors & Devices:
- Inkjet Print-Heads & Nozzles
- MEMS Pressure Sensors
- Digital Light Processing (DLP) Technology
- Airbag Accelerometer sensors
- Microfluidic applications like Lab-on-a-chip sensing
devices
- Precise measurement devices for oil and gas exploration
(ex. downhole sensors)
How Does Micralyne create MEMS Sensor Devices?
- Precision micromachining
- We build up or bond structures with different materials
– layer by layer
- Then we selectively etch away different layers to
make 3-D structures
- For a detailed example of a common fabrication process, view
our Micragem
SOI MEMS Platform
Micralyne develops and manufactures mems sensing
devices for leading companies in the communications,
energy,
life
sciences, and transportation
industries.
If you are interested in learning more about developing
MEMS devices, please contact
Micralyne to discuss its MEMS
foundry services.
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