MEMS Technologies
The future starts now with technologies that bring your visions to life.
Micralyne MEMS technology provides microfabrication processes for whatever devices and products you’re pioneering. We offer several standard MEMS products and product families, as well as microfluidic devices and custom microfabrication of custom MEMS devices.
MEMS Technology Capabilities
Advanced MEMS Comb Drives
Achieve the cost benefits of lower operating voltages and better electrostatic comb drive linear performance with Micralyne’s advanced MEMS comb drives. Learn More »
Through Silicon Via
Reduce die footprints and enable electrical connections through your wafers with Micralyne’s TSV (through silicon via) and engineered substrate. Learn More »
GLAD
Micralyne’s patented GLancing Angle Deposition (GLAD) technology lets you create highly structured thin films from a wide range of materials and allow you to create unique properties in a variety of areas, such as light manipulation and molecular manipulation. Learn More »
Gold-Tin (AuSn) Solder Electroplating
Micralyne offers a patented process for electroplating of AuSn solder alloy, at compositions from 10 to 40 Sn (wt%). AuSn solder electroplating lowers your production costs while giving more control over thickness. Learn More »
Micragem™
A standardized process platform for SOI-based MEMS fabrication with a set of design and process guidelines that can be used to standardize manufacturing for a number of different types of MEMS components. Learn More »
Protolyne® Microfluidic Chips
Protolyne is a development platform for semi-custom microfluidic chips that will be fabricated, based on a customer’s design, quickly and for a reasonable price. Devices are run in batches containing devices with different designs. Customers are required to follow some simple design guidelines.
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Microfluidic Chips
From the simplest to the most complex projects, Micralyne designs and fabricates microfluidic chips in a variety of formats and materials. Microfluidic chips are ideally suited to a wide variety of chemical and biochemical analyses. Learn More »
Spatial Light Valve (SLV)
A linear array of MEMS optical switch elements offering high speed and high throughput. Control micro-optics and get exceptional switching speed with the high-performance Spatial Light Valve. Learn More »
Silicon Optical Bench (SiOB)
Micralyne custom designs and manufactures application-specific Silicon Optical Bench (SiOB) Systems that serve as a platform for highly integrated MEMS optical components. Learn More »
Wafer Level Packaging
Micralyne’s MEMS wafer level packaging (WLP) reduces the footprint of physical die and allows electrical connections to be formed inside the die cavity. Learn More »
