Micralyne Installs Volume High Aspect Ratio Etching System –

August 03, 2004

DRIE Machine at Micralyne MEMS Foundry

Edmonton, Alberta, August 3, 2004 – Micralyne Inc., a market-leading MEMS manufacturer, today announced its completed implementation of an AMS 200 SE (Silicon Etcher) from Alcatel Micro Machining Systems, a leading supplier of deep silicon etching equipment (DRIE).

Micralyne, which manufactures high quality MEMS products for the transportation, communications, life sciences and other industries, is utilizing the AMS 200 system for a wide range of applications including telecom optical systems, drug delivery systems and key components for commercial printers.

In evaluating the available DRIE tools, the ALCATEL AMS 200 stood out among other available tools for its volume capabilities, precise control, high etch rates and cost-effectiveness.

“Many of our customers are beginning to ramp up their product volumes and we are responding by investing in dedicated production tools to meet these demands. We looked to purchase an additional DRIE tool that allowed us to maintain our high quality standards while meeting our significant volume needs, ” said Chris Lumb, President & CEO of Micralyne.

“We are already impressed with the results we have seen from these initial weeks after a very rapid commissioning period. We now have the AMS 200 working in multiple shifts to fulfill current customer demands and initiate new projects,” he concluded.

“We are very pleased to be the DRIE supplier of choice to a MEMS manufacturing leader such as Micralyne,” said Jean-Marc Gruffat, Director of Sales and Marketing for Alcatel Micro Machining Systems product group. “This installation contributes greatly to our strategy to continue bringing real benefit to our customers in the MEMS community around the globe. We consider Micralyne’s purchase of our AMS 200 system the beginning of a growing partnership as Micralyne continues to increase its manufacturing capacity.”

The Alcatel AMS 200 deep Silicon Etcher is specifically designed to deliver superior etch performances to meet challenging requirements, including very high etch rate (>20 μm/min) high mask selectivity, excellent etch uniformity and profile controls. The Alcatel patented ICP ” I-Speeder ” source is configured to offer perfectly stable and repeatable processes over 24hours full operation time. Its compatibility with Class 10 Clean Room environments, its easy maintenance access as well as its very small footprint makes the system particularly appropriate for a MEMS production line.

Along with this addition of a DRIE tool, Micralyne has also made other recent capital investments such as a Karl Suss Mask Aligner (MA6/BA6), a second E-Beam Evaporation system and optical testing and metrology equipment. Details on Micralyne’s MEMS manufacturing capabilities can be found on its website or via a Micralyne representative at +1-780-431-4400.

MEMS Comb Drive

Photo: Micralyne DRIE etched combdrive structures

About Alcatel Micro Machining Systems
Alcatel Micro Machining Systems (MMS) is a business unit within Alcatel Vacuum Technology headquartered in Annecy, France. Alcatel MMS specializes in the designing, manufacturing, marketing and servicing of deep plasma etching systems for the fabrication of Micro Electro Mechanical Systems (MEMS) and Micro Optical Electro Mechanical Systems (MOEMS). Its main application markets are the telecommunications, automotive, aerospace, computer peripherals, power devices and bio-medical industries around the globe. The ALCATEL AMS 200 deep ICP etching production tool range includes the SE (Silicon Etcher) specifically designed for etching of Silicon and SOI and the DE (Dielectric Etcher) for etching of thick SiO2 and glass-like materials. Beginning of 2004, Alcatel Vacuum technology, a 100% owned subsidiary of Alcatel SA, launched its new brand name “Adixen” for the commercialization of its vacuum products and deep plasma etching systems.

Contact Information:
Jean-Marc Gruffat
Micro Machining Systems
Alcatel Vacuum Technology France
98 Avenue de Brogny – BP 2069
74009 Annecy Cedex – France
+ 33 450 65 78 44

About Micralyne
Micralyne develops and manufactures microfabricated and MEMS (Micro-Electro-Mechanical-Systems)-based products. Micralyne is one of the largest independent companies in the world that manufactures MEMS in high volumes. MEMS technology is built on the premise of making industrial components smaller, faster and less expensive and facilitates radical improvements in the miniaturization of electronic and mechanical devices. These types of devices are used in many industries including communications, automotive, aerospace, and life sciences. More specifically, Micralyne’s micron-scale solutions (i.e. 1000 microns = 1 millimetre) are found in automotive emission sensors, optical switching technology in telecommunication networks, lab-on-a-chip devices for drug discovery, and commercial press equipment for printing today’s most popular magazines. Micralyne is a profitable and growing company headquartered in Edmonton, Alberta, Canada.

For further information contact:
Mr. Chris Lumb
President & CEO
Micralyne Inc.
1911 – 94 Street
Edmonton, Alberta
Canada T6N 1E6
Phone: 780-431-4400