For a printable version of Newslyne click here
Micralyne Newslyne - November 2008
about micralyne mems capabilities event calendar news releases mems resources contact us


Welcome to the November 2008 Edition of Newslyne, Micralyne's quarterly e-newsletter. In this edition learn about Light Assisted Electrochemical Etching, MEMS supply during recessionary times and recent Micralyne news.

100 Years of Innovation at the University of Alberta
Micralyne is featured in TEC Edmonton's 2nd Edition of Patent Portraits

(click here to download a copy of Patent Portaits 2nd Edition)

Patent Portraits - 2nd Edition


Contents - November 2008

:: Message from the CEO
:: Light Assisted Electrochemical Etching - Very High Aspect Ratio Silicon Etching
:: Micralyne News & Events


Message from the CEO

Mr. Chris Lumb, President & CEO, Micralyne
Mr. Chris Lumb, President & CEO, Micralyne
MEMS Supply During Recessionary Times

If you're a buyer of MEMS products and development services, will your supply remain secure during the pending recession? While your focus may be on whether your own customers will continue to buy from you, you need to have secure suppliers as well as secure customers.

Is your supplier profitable? Does it generate cash? Is your supplier heavily dependent on the automotive industry, which is being particularly hard hit by this downturn? If your supplier is not healthy, how fast can you transfer your requirements to another supplier?

Because your "switching costs" - that is, the cost and time it will take you to find a new supplier - are very high for specialized products like MEMS, it's vitally important that you choose a healthy MEMS supplier. And if you've already chosen one, it's critical to you that you ensure your MEMS supplier is healthy, or that you have more than one supply choice.

We want to take this opportunity to reassure our customers that we are financially secure. We have a proven track record of survival and growth through troubled economic times. We have achieved this by defining innovative ways to meet our customers' needs - technically and commercially. We believe that our success comes from our customers' success, and that true success is measured over the long term. Thus, during times of uncertainty, we are prepared to work with our customers to generate innovative solutions to challenging times. We believe that by doing what's right for our customers, and focusing on the long term, we'll ensure both our success and that of our customers.

We will work with you to meet your long-term needs, while being aware of your short-term constraints. Let us work with you in understanding you competitive advantage, and we will help to define a sustainable path to your future.

Please contact us if you want to discuss your MEMS supply with us.

- Chris Lumb, President & CEO, Micralyne -


Light Assisted Electrochemical Etching - Very High Aspect Ratio Silicon Etching

Applications such as optoelectronics, micro-optics, energy conversion, environmental monitoring, microelectronics,
Fig. 1: An angled close up of the etched region showing the density of the holes and the hole profile.  The holes are on a 12 um pitch.
Fig. 1: An angled close up of the etched region showing the density of the holes and the hole profile. The holes are on a 12 um pitch.
Fig. 2: A side profile showing the etch uniformity of the process. The wafer thickness is 490 to 510um while the etch is 460 to 448 um.
Fig. 2: A side profile showing the etch uniformity of the process. The wafer thickness is 490 to 510um while the etch is 460 to 448 um.
wafer technology, and biotechnology can require a high density of through wafer vias. While state of the art DRIE can reach an aspect ratio of 20:1, this can be too small for some applications.

Micralyne has been able to develop a manufacturing process for very high aspect ratio silicon wet etching through a technique called Light Assisted Electrochemical Etching (LA-ECE). LA-ECE was developed in the early 1990's by groups led by Canham (UK) and Lehmann (Germany) as a means to produce highly porous silicon. This technique allows Micralyne to produce a highly porous silicon wafer with aspect ratios of 60:1 (depth:width).

This process uses an HF solution, an applied voltage and light source to form the holes in the silicon wafer. This process also requires n-type silicon wafers. In order to form these holes, Micralyne is able control the 8-10 variables that can affect the quality of this etch; we routinely get high quality etches that are more than 450 um deep. These holes can be used to produce various types of through wafer vias (fluidic, metal, oxide, etc.).

Please contact Dr. Steve Jakeway should you require any additional information sjakeway@micralyne.com.


- By Dr. Steve Jakeway -

email: sjakeway@micralyne.com
web: www.micralyne.com



MEMS News, Events & Resources

MEMS Manufacturer Micralyne recognized for success as spin off company from University of Alberta
Micralyne Inc., a world leading independent MEMS Manufacturer, was recently recognized by TEC Edmonton for their success as a spin off Innovation Company from the University of Alberta.
::Read Full Release


Canadian MEMS Foundry was named as a finalist for Global Business Award
Micralyne Inc., a world leading independent MEMS Manufacturer, was a finalist for the Export Development Canada (EDC) Global Business of the Year award presented by the Canadian Manufacturers and Exporters.
::Read Full Release


Micralyne named one of Alberta's Top 40 Employers for Third Year in a Row
Micralyne Inc., a world leading independent MEMS Foundry, has been named one of "Alberta's Top 40 Employers" for 2009 by Mediacorp Canada, for the third year in a row.
::Read Full Release


Edmonton based MEMS Foundry Named Top 50 MicroNano Technology Supplier by OnBoard Technology Magazine
Micralyne Inc., a world leading independent MEMS Foundry, will be recognized this week by OnBoard Technology Magazine as one of the Top 50 MicroNano Technology suppliers.
::Read Full Release


Contact Information: Micralyne Inc.
1911-94 Street, Edmonton, Alberta, Canada, T6N 1E6
Phone: 1.780.431.4400 Fax: 1.780.431.4422
Email: info ( at ) micralyne.com