Inertial Sensors

Inertial sensors are used to measure aspects of physical movement like thrust, velocity, angle and direction, and are widely used in consumer applications like smart phones, game consoles, automotive air bag systems and GPS displays. However, the greater inertial sensor market includes oil and gas exploration, geological survey equipment, medical devices and aerospace. Regardless of application, MEMS-based inertial sensors require complex and precise etching techniques to create fine geometries that are consistent across the wafer.